Warped wafers are also transported! Belt conveyor type automatic resist coating device (coater)
This is a belt conveyor type track system spin coater. It offers high throughput while being capable of transporting any warped wafer!
【Features】 ■ High throughput with belt conveyance (high processing capacity) ■ Capable of transporting warped wafers! ■ Achieves low cost ■ Automatic wafer size recognition system ■ Proven performance with a variety of chemicals ■ Reduced footprint ■ Many options with minimal resist ■ Lineup tailored to production volume Achieve high throughput without using robots! This is a spin coater with belt conveyance. Due to the track system (belt conveyance), transporting warped wafers is not a problem. While robots offer high flexibility in transport flow, if the coating and baking processes follow a fixed transport flow, large-scale processing is possible by using a parallel transport system (suitable for mass production). This product is equipped with spin coating, HMDS treatment, baking, and cooling functions. We offer a lineup tailored to production volume even for fully automatic machines. By handling everything from design to manufacturing and sales in-house, we have achieved low prices. We have proven performance with a variety of chemicals such as polyimide, SOG, WAX, and silicone. *For more details, please refer to the PDF document or feel free to contact us.
- 企業：エイ・エス・エイ・ピイ
- 価格：Other
